Optical-Emission Spectroscopy on the Gaseous Electronics Conference Rf Reference Cell

Abstract

A summary of the experimental observa- tions of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non- reference conditions, including etching type plasmas. These measurements provide a detailed description of the temporal evolu- tion of optical emission from different excited atomic states within different atomic and ionic species, as well as their radial and axial distributions. Some of the measurements have been placed on a absolute radiometric scale to provide com- parisons to model calculations. Spectral line profile measurements are also pre- sented to provide some insight into the multi-component particle velocities present in such plasmas.