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Book Chapter

Principle of Cleanroom

  • Xu Z
Springer Berlin Heidelberg, (2014), 377-465
DOI: 10.1007/978-3-642-39374-7_8
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Abstract

Cleanroom is the most important and most representative measure to create the clean microenvironment with air cleaning technology. The principle of cleanroom is the theoretical base for the design, operation, and maintenance of the cleanroom well.

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APA

Xu, Z. (2014). Principle of Cleanroom. In Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms (pp. 377–465). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_8

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