Realization of flexible and parallel laser direct writing by multifocal spot modulation

Abstract

In this investigation, we propose a strip segmentation phase (SSP) method for a spatial light modulator (SLM) to generate independent multifocal spots when the beam passes through a high numerical aperture (NA) lens. With the SSP method, multifocal spots can be generated with each spot independently, flexibly and uniformly distributed. The performance of the SSP method is first validated with numerical simulation. Then, by applying the modulation method with SLM and importing the beams into an inverted fluorescence microscopy system with a high-NA lens, the spot distribution and their shapes can be observed by fluorescent image. The fluorescent image exhibits high uniformity and high consistency with the aforementioned numerical simulations. Finally, we dynamically load a series of phase maps on SLM to realize continuous and independent spot movement in a multifocal array. By laser direct writing on photoresist, a complex NWU-shape structure can be realized flexibly with multi-task fabrication capability. The SSP method can significantly improve the efficiency and flexibility of laser direct writing. It is also compatible with most recent techniques, e.g., multiphoton absorption, stimulated emission depletion and photo-induced depolymerization etc., to realize parallel super-resolution imaging and fabrications.