A series of Ti/Ti-diamond-like carbon (Ti-DLC) films was deposited onto monocrystalline Si substrates by dual-magnetron sputtering. The mechanical properties, chemical composition, and microstructure of the films were investigated by Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), X-ray diffraction (XRD), and nanoindentation. The biocompatibility of the Ti-DLC films was evaluated via cell viability testing. The TiC phase was formed at a Ti content of 4.43 atom %, and the surface roughness gradually increased as the Ti content increased. Ti-DLC films with 17.13 atom % Ti exhibited superior adhesion strength and surface hardness. The optical densities (ODs) of the different Ti-DLC films were similar, indicating that the films exhibit biocompatibility regardless of the Ti content. Overall, doping DLC films with Ti provides a better film for medical applications, as it improves the mechanical properties, as evidenced by the elastic modulus, hardness, adhesion strength, and surface roughness of the coating, and maintains ideal biocompatibility.
CITATION STYLE
Zhang, M., Xie, T., Qian, X., Zhu, Y., & Liu, X. (2020). Mechanical properties and biocompatibility of Ti-doped diamond-like carbon films. ACS Omega, 5(36), 22772–22777. https://doi.org/10.1021/acsomega.0c01715
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