Finite element simulation of BAW propagation in inhomogeneous plate due to piezoelectric actuation

Abstract

A set of finite elements (FEs) is formulated to analyze wave propagation through inhomogeneous material when subjected to mechanical, thermal loading or piezoelectric actuation. Elastic, thermal and electrical properties of the materials are allowed to vary in length and thickness direction. The elements can act both as sensors and actuators. These elements are used to model wave propagation in functionally graded materials (FGM) and the effect of inhomogeneity in the wave is demonstrated. Further, a surface acoustic wave (SAW) device is modeled and wave propagation due to piezoelectric actuation from interdigital transducers (IDTs) is studied. © Springer-Verlag Berlin Heidelberg 2003.