Colloidal lithography

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Abstract

This chapter is a visual guide to the numerous approaches to nanolithography nanofabrication on large area based on supramolecular self-assembly. A short history of this recent scientific and technological field, an outline of the mostcited methods of self-assembly, and tables reporting different nanofabrication methods are reported. Indications on requirements, advantages, and drawbacks of the various approaches are also listed in the table. Thanks to the recently developed metal-assisted catalytic etching (MACE), the colloidal patterns can be easily propagated to silicon and other semiconductors opening a wide field of morphology, nanostructures, and applications.

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Boarino, L., & Laus, M. (2014). Colloidal lithography. In Handbook of Porous Silicon (pp. 541–550). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_55

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