Diamond sensors with silicon technologies for sensing in harsh environments

Abstract

This paper presents the results of a research program aimed at developing passive and active circuit components to be used in air vehicle applications. The team of Advanced Engineering Technology (AET, Inc.) and Vanderbilt University is developing diamond sensors that will be integrated with a silicon-based integrated circuit for incorporation into air vehicles. Specifically, the team is developing the technology necessary to integrate chemical vapor deposited (CVD) diamond films with the silicon integrated circuit.