ε-Ga2O3 is one of the five polymorphs of Ga2O3, which has attracted considerable attention because it exhibits unique polarization and ferroelectric properties. In this chapter, we describe the growth of ε-Ga2O3 thin films via mist chemical vapor deposition (CVD). In the epitaxial growth of ε-Ga2O3 thin films, we demonstrated that various substrates allow ε-Ga2O3 growth via mist CVD because of the atomic arrangement between the surface of the substrate and the ε-Ga2O3 growth surface. Further, a method for distinguishing the hexagonal and orthorhombic structures of ε-Ga2O3 using X-ray diffraction (XRD) φ-scans was explained in detail. In our experiments, all ε-Ga2O3 thin films grown via mist CVD exhibited orthorhombic crystal structure, which permits rotational domains. Furthermore, the growth mechanism of these rotational domains was explained using the atomic arrangement of ε-Ga2O3 and the crystal structures of the substrates. Finally, bandgap engineering from 4.5 to 5.9 eV was demonstrated via mist CVD with the incorporation of In and Al.
CITATION STYLE
Nishinaka, H. (2020). Mist chemical vapor deposition 2: Heteroepitaxial growth of ε-Ga2O3 on various substrates. In Springer Series in Materials Science (Vol. 293, pp. 243–255). Springer. https://doi.org/10.1007/978-3-030-37153-1_13
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