Adhesion and Friction in MEMS

Abstract

Characteristic for MEMS structures is the high surface to volume ratio. In combination with the extreme smooth surfaces, this can easily lead to dominant adhesion forces between contacting structures. In the past years, stiction problems have been successfully reduced by avoiding contact between the slender structures and the substrate. In micromotor applications, contact between moving and fixed parts can not be avoided, or even is essential to the functioning of the device. Reduction of adhesion forces, to obtain low enough friction is needed in these devices.