Force sensing by microrobot on a chip

Abstract

In this paper, we discuss a force sensing by microrobot called magnetically driven microtool (MMT) in a microfluidic chip. On-chip force sensor is fabricated by assembling layers to neglect the friction issue and it is actuated by permanent magnets, which supply mN order force to stimulate microorganisms. The displacement is magnified by designing beams on the force sensor and the sensor achieved 100μN resolutions. We succeeded in on-chip stimulation and evaluation of Pleurosira laevis by developed MMT with force sensing structure.