Novel Robust Design Method of Multilayer Optical Coatings

Abstract

We present a novel fast robust design method of multilayer optical coatings. The sensitivity of optical films to production errors is controlled in the whole optimization design procedure. We derive an analytical calculation model for fast robust design of multilayer optical coatings. We demonstrate its effectiveness by successful application of the robust design method to a neutral beam splitter. It is showed that the novel robust design method owns an inherent fast computation characteristic and the designed film is insensitive to the monitoring thickness errors in deposition process. This method is especially of practical significance to improve the mass production yields and repetitive production of high-quality optical coatings.