Nondestructive Mapping of Surface Film Parameters with Dynamic Imaging Microellipsometry

Cohn, R. F., & Wagner, J. W. (1989). Nondestructive Mapping of Surface Film Parameters with Dynamic Imaging Microellipsometry. In Review of Progress in Quantitative Nondestructive Evaluation (pp. 1219–1226). Springer US. https://doi.org/10.1007/978-1-4613-0817-1_152