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Book Chapter

Ultrapure Water

  • Kozicki M
  • Hoenig S
  • Robinson P
Springer Netherlands, (1991), 162-185
DOI: 10.1007/978-94-011-7950-8_9
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Abstract

Ultrapure water (UPW), high-purity water or highly purified water (HPW) is water that has been purified to uncommonly stringent specifications. Ultrapure water is a term commonly used in manufacturing to emphasize the fact that the water is treated to the highest levels of purity for all contaminant types, including: organic and inorganic compounds; dissolved and particulate matter; volatile and non-volatile; reactive, and inert; hydrophilic and hydrophobic; and dissolved gases.

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Kozicki, M., Hoenig, S., & Robinson, P. (1991). Ultrapure Water. In Cleanrooms (pp. 162–185). Springer Netherlands. https://doi.org/10.1007/978-94-011-7950-8_9

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