Study on Subsurface Damage Generated in Ground Si Wafer

  • Hosseini B
  • Zhou L
  • Tsuruga T
  • et al.
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Hosseini, B. S., Zhou, L., Tsuruga, T., Shimizu, J., Eda, H., Kamiya, S., & Iwase, H. (2006). Study on Subsurface Damage Generated in Ground Si Wafer. In Towards Synthesis of Micro-/Nano-systems (pp. 309–313). Springer London. https://doi.org/10.1007/1-84628-559-3_54

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