Ac dependence of electrical properties of SiOx/ZrO2 Multilayer Nanocomposites with Si Nanocrystals

Abstract

The following paper presents the method of obtaining silicon nanocrystals in a matrix of zirconium dioxide and the results of measurements of electrical properties. The tested material was produced by alternating vacuum evaporation with SiOx and ZrO2 and then annealed to obtain silicon nanocrystals. The measurement parameters in the function of temperature and frequency were: capacitance, resistance, the angle of phase shift and tangent of dielectric losses. On this basis, and referring to the dimensions of the sample, conductivity was determined as a function of temperature and frequency. Thanks to this, the mechanism of charge transfer and the nature of the material have been proposed.