Scanning nanopipette probe microscope for nanofabrication using atmospheric pressure plasma jet

Abstract

We developed a novel scanning probe microscope (SPM) technique for fine processing of material surface using a localized fine atmospheric pressure plasma jet (APPJ) generated from a nanopipette. The nanopipette is a tapered glass capillary with an aperture of sub-micrometer. Using the nanopipette as a nozzle, it was possible to localize irradiation area of the APPJ. The nanopipette could also be used as a probe for a scanning probe microscope operated with shear-force feedback control, which is capable of positioning the pipette edge in the vicinity of material surfaces for APPJ processing. By using the SPM system, sub-micrometer holes were successfully fabricated.