Technical aspects of atomic force microscopy

Abstract

In order to perform nanoscale motions in AFM (e.g. during scanning) very precise actuators are required. Piezoelectric actuators achieve the required precision. We describe the principles of operation of these actuators and present examples of specific actuators. In the following principles of vibration isolation are considered, because the amplitude of floor vibrations is much larger than the desired amplitude of the tip-sample vibrations.