Abstract
The anodization process for the formation of very thin porous alumina films on Si was investigated in detail in this paper. The evolution of current density versus time during anodization was first investigated, and Transmission Electron Microscopy was used to characterize the samples at different anodization times before full Al consumption. Anodization was performed in two different electrolytes and the obtained films were compared. © 2005 IOP Publishing Ltd.
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CITATION STYLE
Kokonou, M., Nassiopoulou, A. G., Giannakopoulos, K. P., & Boukos, N. (2005). Nanotemplate alumina films on a silicon substrate fabricated by electrochemistry. Journal of Physics: Conference Series, 10(1), 159–162. https://doi.org/10.1088/1742-6596/10/1/039
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