Fabrication of scandia-stabilized zirconia thin films by instant flash light irradiation

Abstract

In this study, scandia-stabilized zirconia (ScSZ) electrolyte thin-film layers were deposited via chemical solution deposition (CSD). We selected 10ScSZ (10% Sc2O3, 90% ZrO2 molar ratio) as the target material, and the precursor solution was prepared by precise calculations. The 10ScSZ solution was deposited on Al2O3 substrate using a spin-coating method. Then, the substrate was sintered using two methods: flash light irradiation and thermal. The characteristics of the thin films were compared, including ionic conductivity, surface morphology, and chemical composition. Pulsed light sintering was applied in the sintering step under a variety of energy density conditions from 80 to 130 J/cm2, irradiation on/off times of 10 ms and 10 ms/500 ms, number of pulses, and bottom heat from 300 to 600 °C. The ionic conductivity of the ScSZ electrolyte layers fabricated by thermal or flash light irradiation methods was tested and compared. The results show that the ScSZ electrolyte layer sintered by flash light irradiation within a few seconds of process time had similar ionic conductivity to the electrolyte layer that was thermal sintered for about 10 h including cooling process.