Covering all aspects of transport phenomena on the nano- and micro-scale, Springers Encyclopedia of Microfluidics and Nanofluidics includes over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Specifically, subjects covered in this comprehensive Springer Reference include electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
CITATION STYLE
Chung, C.-K. (2014). Plasma Etching. In Encyclopedia of Microfluidics and Nanofluidics (pp. 1–18). Springer US. https://doi.org/10.1007/978-3-642-27758-0_1251-5
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