Monte Carlo method applied to the ABV model of an interconnect alloy

Abstract

A Monte Carlo (MC) simulation of a 2D microscopic ABV (metal A, metal B and void V) Ising model of an interconnect alloy is performed by taking into account results of Finite Element methods (FEM) calculations on correlated void-thermal effects. The evolution of a homogeneous structure of a binary alloy containing a small percentage of voids is studied with temperature cycling. The diffusion of voids and segregation of A type or B type metals is a function of the relative interaction energy of the different pairs AA, BB, AB, AV and BV, the initial concentrations of A, B and V and local heating effect due to the presence of clusters of voids. Voids segregates in a matrix of A type, of B type or AB type and form large localized clusters or smaller delocalized ones of different shapes.