Characterizing metal nanoparticle films: A methodology using surface micromachining by direct printing

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Abstract

We report a methodology for characterizing the mechanical properties of metal nanoparticle films based on microfabricated structures. Structures are mechanically characterized by beam deflection measurements and nanoindentation. Based on a 2-sphere sintering model, and the relationship between particle size and melting temperature, a relationship between the nanoparticle film's elastic modulus and film geometry has been determined to be E/Eo = (1-(L/Lo)3)0.6982, where L/L0 is the degree of particle fusion. This methodology was used to determine the property-process for silver nanoparticle films but should be transferrable to other nanoparticle films.

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APA

Lam, E. W., & Schmidt, M. A. (2012). Characterizing metal nanoparticle films: A methodology using surface micromachining by direct printing. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 433–436). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2012.115

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