In different technical fields the existence of low cost sensors to be able to measure both humidity and gas in environmental pollution applications is an increasing need. The paper proposes a first step in the realization of an integrated sensor able to give a possible response to this aim. Using the sol-gel technology, a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support is proposed. © 2014 Springer Science+Business Media.
CITATION STYLE
Betta, G., Esposito, S., Laracca, M., & Pansini, M. (2014). Thin film humidity sensor based on sol-gel technology. In Lecture Notes in Electrical Engineering (Vol. 162 LNEE, pp. 445–448). https://doi.org/10.1007/978-1-4614-3860-1_79
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