Is Energy Resolution Still an Important Specification in EDS?

Abstract

Energy Dispersive Spectroscopy (EDS) X-ray detectors have undergone a wave of technology enhancements since the first silicon drift-based EDS detector (SDD) was commercially introduced roughly 15 years ago. The first such EDS systems featured an active area of 5 mm 2 , an energy resolution between 160 eV–200 eV, and a maximum collection rate approaching only 100,000 input counts/second.