PECVD polymerised coatings on thermo-sensitive plastic support

Abstract

With this paper we describe several alternative approaches aimed at polymer-on- polymer coatings, produced by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique. In our case three types of input compounds were applied for varied "cold plasma" PECVD deposition of nano-thick functional layers: namely hexamethyldisiloxane (HMDSO), pentane and toluene onto plastic substrates. The output characterisations through SEM imaging, ATR-FTIR, EDX, AFM and contact angle measurements, proved the methods' feasibility and properties of the plasma-polymerised coatings.