Recent advances in the fabrication of microflow devices using micro-electromechanical systems (MEMS) technology are described. Passive and active liquid flow control and particle-handling methods in micrometer-scale channels are reviewed. These methods are useful in micro total analysis systems (μTAS) and laboratory-on-a-chip systems. Multiple flow control systems (i.e., arrayed microvalves) for advanced high-throughput microflow systems are introduced. Examples of microflow devices and systems for chemical and biochemical applications are also described. © 2011 Springer-Verlag Berlin Heidelberg.
CITATION STYLE
Shoji, S., & Kawai, K. (2011). Flow control methods and devices in micrometer scale channels. Topics in Current Chemistry, 304, 1–25. https://doi.org/10.1007/128_2011_146
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