Limitations and optimization of low-coherence interferometry for high precision microscopic form measurement

Lehmann, P., & Niehues, J. (2009). Limitations and optimization of low-coherence interferometry for high precision microscopic form measurement. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 244–249). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_41