Thin flexible and stretchable tactile sensor based on a deformable microwave transmission line

Abstract

This paper presents a MEMS tactile pressure sensor based on distributed microwave sensing. Rather than using arrays of capacitive or resistive pressure sensors as is currently the state of the art, the sensor reported here determines the degree and location of applied pressure by measuring reflections on a thin embedded microwave transmission line. This approach allows for a rugged wide-area sensor that is easily and inexpensively fabricated and which requires only a single two-conductor connection to external electronics. The sensor is both flexible and stretchable, a rare combination of features among other tactile sensors.