Abstract
We present direct writing for three-dimensional (3D) microfabrication using an X-ray micro-beam (a few microns in diameter). The micro-beam at an energy of 10 keV was generated with a single refractive lens which made of a polymer such as polytetrafluoroethylene (PTFE, also called Teflon) or polymethylmethacrylate (PMMA) and fabricated with our high aspect-ratio microtechnologies using synchrotron radiation (SR). Such optica] elements have the parabolic surface with a radius of 4 µm and can focus the X-ray at a focal length of 0.5–1.5 m. Moreover, not only one micro-beam but also many micro-beams array have been successfully generated.
Cite
CITATION STYLE
Katoh, T., Zhang, Y., Kagoshima, Y., Tsusaka, Y., & Matsui, J. (2001). Direct Microfabrication Using an X-Ray Micro-Beam. In Transducers ’01 Eurosensors XV (pp. 1550–1553). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_366
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