Abstract
This chapter discusses a variety of system structures for microelectromechanical systems (MEMS) that employ a feedback loop inspired by sigma-delta modulation. Sigma-delta modulators are classic electronic circuits that implement data conversion. The feedback loop typical for sigma-delta modulation can be applied to actuate a MEMS device or control its state. The dynamics of such systems are described by a set of discrete-time equations (map). We show how these maps can be derived for different examples of MEMS and highlight the dynamics that are universal for all examples.
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CITATION STYLE
Blokhina, E., Giounanlis, P., Dominguez-Pumar, M., Gorreta, S., Pons-Nin, J., & Feely, O. (2015). Discrete-time modelling of sigma-delta inspired systems for MEMS. In Springer Proceedings in Mathematics and Statistics (Vol. 112, pp. 37–67). Springer New York LLC. https://doi.org/10.1007/978-3-319-12328-8_3
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