Experimental investigations on piezoelectric based prototype actuator

Abstract

Present positioning applications demand macro positioning range with micro/nano positioning accuracy. This paper describes the development of a new prototype actuator with piezoelectric stack actuator as a primary actuation system for micro/macro positioning applications. The displacement of the primary actuator is amplified by a hydraulic displacement amplification mechanism. A displacement amplification factor of 72.2 is observed at an actuation frequency of 1Hz which is in good agreement with the theoretically estimated value. The behavior of the prototype actuator is studied at different loads and frequencies. © 2012 Springer-Verlag.