Development and prospects

Abstract

This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.