Structure and Tribological Characterization of TiB2/TiBN Multilayer Coatings Deposited by Magnetron Sputtering

  • Lin W
  • Chen J
  • Zhou J
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Abstract

TiB 2 /TiBN multilayer coatings were deposited on Si(100) wafers by reactive magnetron sputtering technology. The microstructure and microhardness of the multilayer coatings have been studied with X-ray diffraction (XRD), atomic force microscopy (AFM) and microhardness tester. The friction and wear behaviors of the multilayer coatings sliding against Al 2 O 3 balls were evaluated on a pin-on-disc tribometer under dry friction condition. The results showed that the single layer TiB 2 consists of a hexagonal TiB 2 phase with the strong (001) texture, and the Ti-B-N film is XRD-amorphous. Structural analysis confirmed that (001) preferential orientation of TiB 2 phase is reduced, and the crystal structure of TiBN existed in the structure of TiB 2 /TiBN multilayer coatings. The smallest friction coefficient and the best wear resistance were measured in TiB 2 /TiBN multilayer coatings with the modulation of 30 nm.

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Lin, W. S., Chen, J., & Zhou, J. (2009). Structure and Tribological Characterization of TiB2/TiBN Multilayer Coatings Deposited by Magnetron Sputtering. In Advanced Tribology (pp. 651–653). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-03653-8_212

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