This work reviews progress in the fabrication of high-resolution porous silicon gratings. A comparison of the various fabrication methods is presented, including prepatterning of silicon, stamping, laser writing, and photolithographic and photo-assisted dissolution. Various types of sensors incorporating gratings are discussed which use either intensity and/or spatial (angular) measurement. The sensing capabilities, features, and limitations of these types of gratings are presented.
CITATION STYLE
Keating, A. (2014). Porous silicon diffraction gratings. In Handbook of Porous Silicon (pp. 823–833). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_84
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