Skip to main content
Book Chapter

Acoustic Wave Studies During Fast ION Beam Interactions with Solids

  • Deemer B
  • Murphy J
  • Claytor T
  • et al.
Springer US, (1993), 995-1002
DOI: 10.1007/978-1-4615-2848-7_127
N/ACitations
Citations of this article
1Readers
Mendeley users who have this article in their library.
Get full text

Abstract

Ion beam material modification is currently being used for several important technological applications such as semiconductor doping [1], surface modification of metals [2], cold etching [1], micro machining [1] and material analysis [3]. Ion beam processing has many...

Cite

CITATION STYLE

APA

Deemer, B. C., Murphy, J. C., Claytor, T. N., Tesmer, J. R., & Spicer, J. B. (1993). Acoustic Wave Studies During Fast ION Beam Interactions with Solids. In Review of Progress in Quantitative Nondestructive Evaluation (pp. 995–1002). Springer US. https://doi.org/10.1007/978-1-4615-2848-7_127

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free