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Book Chapter

Electrostatic Microvalves in Silicon with 2-Way-Function for Industrial Applications

  • Schaible J
  • Vollmer J
  • Zengerle R
  • et al.
Springer Berlin Heidelberg, (2001), 900-903
DOI: 10.1007/978-3-642-59497-7_213
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Schaible, J., Vollmer, J., Zengerle, R., Sandmaier, H., & Strobelt, T. (2001). Electrostatic Microvalves in Silicon with 2-Way-Function for Industrial Applications. In Transducers ’01 Eurosensors XV (pp. 900–903). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_213

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