Near fields of periodic gratings calculated using rigorous electromagnetic theory

Abstract

Rigorous electromagnetic theory (REMT) can be used to calculate the fields above dielectric and metallic gratings. In this paper, by including evanescent orders, the near fields are presented. The Legendre method is used to carry out these calculations. In this method the fields in each of the homogeneous sections along a grating period are approximated by Legendre polynomials. This method is an exact eigenfunction method in which the eigenvalues are found using simple matrix eigenvalue/eigenvector algorithms. By carefully dealing with the boundary conditions, extremely deep and highly conducting gratings can be examined. The convergence of the diffraction orders and nonimplicit power conservation are used to test the results. Contour plots showing the absolute value of the E‐field near gratings for a large range of periods, depths, duty cycles, angles of incidence, and surface profiles are presented. Copyright © 1994 Wiley Periodicals, Inc.