Abstract
As discussed in Chapters 6–8, the x-rays emitted from a specimen bombarded with the finely focused electron beam of the scanning electron microscope (SEM) can be used to identify which elements are present (qualitative analysis). Using flat-polished samples and a proper experimental setup and data reduction procedure, one can use the measured x-rays from the identified elements to quantitatively analyze chemical composition with an accuracy and precision approaching 1%. We term the analysis of flatpolished samples “conventional microprobe analysis.” The beam energy for conventional microprobe analysis is usually E0 ≥ 10 keV.
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CITATION STYLE
Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D. C., Lyman, C. E., Lifshin, E., … Michael, J. R. (2003). Quantitative X-Ray Analysis: The Basics. In Scanning Electron Microscopy and X-ray Microanalysis (pp. 391–451). Springer US. https://doi.org/10.1007/978-1-4615-0215-9_9
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