Effects of solvent, excitation wavelength, and concentration on the photobehavior of some diazonaphthoquinones

Abstract

Diazonaphthoquinones (DNQs) are the photoactive components of resists used in the fabrication of integrated circuits. Exposed to radiation these compounds release molecular nitrogen undergoing a ring contraction (Wolff rearrangement). In this work the photobehavior of three compounds bearing two and three chromophoric DNQ units has been studied. Photochemical quantum efficiencies of reactant disappearance have been determined in acetonitrile at 290 K and in ethanol/methanol (4/1, v/v) solid matrix at 80 K, using some irradiation wavelengths and different DNQ concentrations. The results obtained show that the course of the photoreaction strongly depends on the medium, the concentration, the temperature and the excitation wavelength. © ARKAT-USA, Inc.