Ferroelectric lithography

Abstract

The effects of domain orientation on the properties of ferroelectric surfaces are examined for single crystal BaTiO3 (100). Domain specific adsorption determined from surface potential variations suggests a mechanism for a new lithographic process. Three approaches (contact electrode, SPM, and e-beam) for patterning surface domains in the absence of a device metal electrode are explored. In particular the interaction of an electron beam with a ferroelectric surface is quantified and it is shown that it can cause both negative and positive surface charge depending on conditions. The domain specific reactivity and domain patterning are combined into a fabrication process that is demonstrated for several classes of nanostructures. © 2007 Springer Science+Business Media, LLC.