Recent developments in two fundamental aspects of electron backscatter diffraction

Abstract

Two very different aspects of electron backscatter diffraction (EBSD) are considered in this paper. Firstly, the use of the technique for the measurement of grain size is discussed with particular reference to the development of international standards to help ensure reproducible and repeatable measurements. In particular the lessons learnt for both calibration of the complete SEM-EBSD system and in choice of the correct data acquisition and processing parameters from an international round robin are summarized. Secondly, extending the capability of EBSD through development of new detectors is discussed. New shadow casting methods provide a means to achieve better accuracy in definition of sample-pattern geometry, while increased detail can be obtained by larger cameras and ultimately direct electron detection.