Microfluidic sensing: state of the art fabrication and detection techniques

Abstract

Here we introduce the existing fabrication techniques, detection methods, and related techniques for microfluidic sensing, with an emphasis on the detection techniques. A general survey and comparison of the fabrication techniques were given, including prototyping (hot embossing, inject molding, and soft lithography) and direct fabrication (laser micromachining, photolithography, lithography, and x-ray lithography) techniques. This is followed by an in-depth look at detection techniques: Optical, electrochemical, mass spectrometry, as well as nuclear magnetic resonance spectroscopy-based sensing approaches and related techniques. In the end, we highlight several of the most important issues for future work on microfluidic sensing. This article aims at providing a tutorial review with both introductory materials and inspiring information on microfluidic fabrication and sensing for nonspecialists. © 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).