In addition to the generation of backscattered and secondary electrons, the interaction of an electron beam with the specimen material releases x-rays which are used to undertake elemental analysis using energy−/wavelength-dispersive x-ray spectroscopy. Characteristics of x-rays are described in this chapter.
CITATION STYLE
Ul-Hamid, A. (2018). Characteristics of X-Rays. In A Beginners’ Guide to Scanning Electron Microscopy (pp. 233–264). Springer International Publishing. https://doi.org/10.1007/978-3-319-98482-7_6
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