Skip to main content
Book Chapter

SIS Capacitor-Based Characterization Techniques

  • Cristoloveanu S
  • Li S
Springer US, (1995), 145-184
DOI: 10.1007/978-1-4615-2245-4_6
N/ACitations
Citations of this article
2Readers
Mendeley users who have this article in their library.
Get full text

Abstract

In this chapter, we describe several capacitance characterization techniques for analyzing the interface and bulk defects at the top and bottom interfaces and in the buried oxide of the SOI material by using its inherent silicon—insulator—silicon (SIS)...

Cite

CITATION STYLE

APA

Cristoloveanu, S., & Li, S. S. (1995). SIS Capacitor-Based Characterization Techniques. In Electrical Characterization of Silicon-on-Insulator Materials and Devices (pp. 145–184). Springer US. https://doi.org/10.1007/978-1-4615-2245-4_6

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free