An Introduction to Laser Assisted Microfabrication, Current Status and Future Scope of Application

Abstract

From the invention of the laser almost about five decades ago scientists have studied the potential of laser micromachining. Compared to high power laser applications most applications on the microscale require rather moderate average powers in the range of a few watts or below along with good beam qualities and the possibility to use pulsed and/or short wavelength laser systems. Most applications in this field are based on ablation, i.e., material removal for structuring, drilling, or precise cutting of materials. However, current activities are also ongoing in adapting rapid prototyping, i.e., generative processes to the microscale. Finally, a tremendous amount of research activities are carried out to generate nanostructures. Because of the wavelength and the diffraction limit in classical optics new approaches have been taken into account to overcome these limitations and making use of the unique properties of laser radiation also on the nanometer scale. This chapter provides an overview of pulsed laser assisted micromachining with a focus on structuring by laser ablation, laser generative processes, and finally nanomachining.