MEMS gyroscope automatic real-time mode-matching method based on phase-shifted 45◦ additional force demodulation

Abstract

In order to solve the problem where existing mode-matching methods in microelectromechanical systems (MEMS) vibrating gyroscopes fail to meet real-time and reliability requirements, this paper presents a novel method to accomplish automatic and real-time mode-matching based on phase-shifted 45◦ additional force demodulation (45◦ AFD-RM). The phase-shifted 45◦ additional force signal has the same frequency as the quadrature force signal, but it is phase-shifted by 45◦ and applied to the sense mode. In addition, two-way phase-shifted 45◦ demodulations are used at the sense-mode detection output to obtain a phase metric that is independent of the Coriolis force and can reflect the mode-matching state. Then, this phase metric is used as a control variable to adaptively control the tuning voltage, so as to change the sense-mode frequency through the negative stiffness effect and ultimately achieve real-time mode-matching. Simulation and experimental results show that the proposed 45◦ AFD-RM method can achieve real-time matching. The mode frequency split is controlled within 0.1 Hz, and the gyroscope scale factor, zero-bias instability, and angle random walk are effectively improved.