Epitaxial growth of gan on magnetron sputtered aln/hexagonal bn/sapphire substrates

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Abstract

Magnetron sputtering is adopted to deposit ~25 nm thick AlN on the surface of hexagonal BN(h-BN)/sapphire substrates, followed by epitaxial GaN growth on top of the AlN/h-BN/sapphire substrate using a metal–organic chemical vapor deposition system. Compared to GaN grown on the h-BN/sapphire surface directly, this method results in a continuous and smooth GaN film with a smaller root mean square roughness. Besides, the introduction of the sputtered AlN layer reduces the dislocation density of GaN by 35.7%. We provide a pathway of GaN epitaxy on the h-BN surface, which significantly improves its surface morphology and crystal quality.

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Wu, J., Li, P., Xu, S., Zhou, X., Tao, H., Yue, W., … Hao, Y. (2020). Epitaxial growth of gan on magnetron sputtered aln/hexagonal bn/sapphire substrates. Materials, 13(22), 1–9. https://doi.org/10.3390/ma13225118

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