Porous silicon formation by anodization

Abstract

The key aspects of porous silicon manufactured by anodization are reviewed, with the following subjects being addressed: anodization of different wafer types, wafer cell design, post-anodization handling requirements (rinsing/drying/storage), parameters affecting layer uniformity, the use of nonaqueous electrolytes and electrolyte additives (surfactants, oxidizers, and other types), methods for tuning porosity, process control and natural variability, different electrode materials, and the requirements for maintaining health and safety.