Fabrication of antireflection-structured surface using vertical nanowires as an initial structure

Abstract

An antireflection structure was fabricated using vertically synthesized iron oxide nanowires as an initial structure. Iron oxide nanowires can be synthesized by simply annealing a thin Fe film in air. The authors propose a process for transforming these nanowires into an array of cone: An additional thin Cr film is deposited onto the nanowires and then etched by reactive ion etching. As a result of the redeposition of Cr, the vertical nanowires were successfully transformed into conical structures. This antireflection nanostructure is replicated onto a polymer surface by thermal nanoimprinting, and the replicated surface exhibited low reflectivity at all visible wavelengths.