Abstract
The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method. © Springer-Verlag Berlin Heidelberg 2012.
Author supplied keywords
Cite
CITATION STYLE
Chen, X. (2012). Advanced high precision control for XY-table. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 7506 LNAI, pp. 11–21). https://doi.org/10.1007/978-3-642-33509-9_2
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
